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摘 要 I
Abstract II
1．引言 1
1.1 半導(dǎo)體材料和納米材料 1
1.2 濕度傳感器 2
1.3 ZnO納米材料的性質(zhì)及其改性 2
2. 實(shí)驗(yàn)方法 4
2.1 氧化鋅樣品和元件的制備 4
2.1.1制備摻雜銦的ZnO納米材料 4
2.1.2 ZnO濕敏元件的制備 4
2.1.3 材料物象和形貌分析 4
2.2 氧化鋅壓電性能的測試 5
2.2.1 濕度源的制備 5
2.2.2 濕敏性能的測試 6
3. 結(jié)果與討論 7
3.1 XRD表征結(jié)果 7
3.2 SEM表征結(jié)果和能譜 8
3.3 ZnO納米材料濕敏能測試的結(jié)果與分析 13
3.4 感濕機(jī)理討論 17
4. 總結(jié) 18
參考文獻(xiàn) 19
致謝 21


基于ZnO一維納米結(jié)構(gòu)濕敏性能研究

摘 要

隨著科技的發(fā)展和人們生活水平的提高，濕度傳感器的應(yīng)用越來越廣，對其性能的要求也越來越高。納米材料作為一類新型的感濕材料，具有很多獨(dú)特的性質(zhì),在濕度傳感器領(lǐng)域內(nèi)具有客觀的前景。
本實(shí)驗(yàn)中所用的納米ZnO用碳熱還原法制得，通過XRD、SEM對其來進(jìn)行表征。然后在不同的濕度下對ZnO納米線進(jìn)行I-T、I-V測試，從而得出ZnO納米線在不同濕度下的電阻變化以及對其肖特基效應(yīng)的影響。
實(shí)驗(yàn)結(jié)果表明，這些器件具有相對較大的靈敏度，從而說明 ZnO 納米線在濕敏領(lǐng)域有很好的應(yīng)用前景。

關(guān)鍵詞：ZnO納米線；濕度傳感器；肖特基效應(yīng)；濕敏特性

Investigation of the humidity sensitivity based on one dimensional ZnO nanostuctures

Abstract

With the developing of technology and improving of People’s living standard，there，re more and more demands put forward to humidity sensors.Nanometer material as a new type of humidity sensing material, it has many unique properties, with the objective of prospect in the field of humidity sensor.
ZnO NWs that Used in the present experiments was by carbon thermal reduction method, then through the XRD、SEM on its to express. Then test the ZnO NWs，volt-ampere characteristics and current and time curve in different humidity, thus obtains the ZnO nano wire resistance change under different humidity and influence on the Schottky effect.
The experimental results show that these devices have relatively high sensitivity, so that the ZnO nanowires have good application prospect in the humidity field.


Key words: ZnO nanowires; humdity sensor; Schoddky effect;humidity sensitivity properties