光干涉法在角度測(cè)量中的應(yīng)用
Application of the Optical Interference Method
in Angle Measurement


摘 要：利用光學(xué)方法測(cè)量角度是一種有效的角度測(cè)量方法，光學(xué)測(cè)角法具有可調(diào)節(jié)、高精度的特點(diǎn)。本論文詳細(xì)介紹了其中基于光學(xué)干涉原理的高精度光干涉測(cè)角法，總結(jié)了光干涉法在小角度測(cè)量、大角度測(cè)量、旋轉(zhuǎn)角度測(cè)量中的應(yīng)用，分析了每種方法的優(yōu)點(diǎn)和局限性，最后指出了利用光干涉法測(cè)量角度未來的發(fā)展前景。
關(guān)鍵詞：干涉法，角度測(cè)量，小角度，大角度，旋轉(zhuǎn)角度


Application of the Optical Interference Method
in Angle Measurement
Abstract : The optical angle measuring is an effective method to measure an angle, it is adjustable and has the characteristics of high precision. This paper introduces the optical interference measuring method in details, which is based on the principle of optical interference and has the highest precision. In this paper, the application of optical interference measuring method in small or big angle measurement and in the rotation angle measurement has been summarized. Also in the paper advantages and limitations of each method are analyzed. At last, the future prospects of angle measurement by optical interference method are pointed out.

Keywords : optical interference method , angle measurement , small angle , large angle, rotation angle