光干涉法在長度測量中的應用

摘 要： 基于光的干涉原理進行長度測量，具有操作簡單，靈敏度高，非接觸測量等優(yōu)點。本文針對光干涉法長度測量中應用廣泛的邁克爾遜干涉儀，外差干涉儀，F(xiàn)-P干涉儀，光纖干涉儀，分別介紹了它們的測量原理，分析了每種方法的優(yōu)點和局限性，并對光干涉法測量長度進行了展望。近年來,國內外開展了大量研究，并進一步提高干涉法的測量精度、提高系統(tǒng)的可靠性、抗干擾能力。干涉測長系統(tǒng)的應用將會更加廣泛.
關鍵詞：光的干涉，長度測量


Application of Optical Interference Method
in Length Measurement
Abstract: The length measurement based on the light interference theory has the advantages of simple operation, high sensitivity, non-contact measurement, etc. Interferometers such as Michelson interferometer, heterodyne interferometer, F-P interferometer, optical fiber interferometer are widely used in length measurement. In this paper, their measuring principles, the advantages and limitations of each method are introduced respectively. Additionally, the future prospects of length measurement by optical interference method are pointed out. In recent years, domestic and foreign researches a lot, and further improve the measurement accuracy, interference method to improve system reliability, anti interference ability. Application of interferometric length measurement system will be more widely.
Keywords：interference of light ，length measurement